Fabrication of cantilevers and double AFM tips for the NanoProfiler

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1162-1167

  Duriau, Edouard ^a   Clarysse, T ^a   Hantschel, T ^a   Vandervorst, W ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

AFM; Cantilever; Carrier profiling; Multi tip AFM; NanoProfiler; NP; SRP

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHARGE CARRIERS; CMOS INTEGRATED CIRCUITS; ELECTRIC PROPERTIES; SEMICONDUCTOR JUNCTIONS; TRANSISTORS;

CANTILEVERS; CARRIER PROFILING; MULTI TIP AFM; NANOPROFILER; SPREADING RESISTANCE PROBE (SRP);

NANOSTRUCTURED MATERIALS;

EID: 34247868041     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.072     Document Type: Article

References (8)

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