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Volumn 483-485, Issue , 2005, Pages 311-314
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XRDT study of structural defects of 6H-SiC crystals
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Author keywords
6H SiC; Dislocations; Micro channels and crystal growth; X ray diffraction topography
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Indexed keywords
CRYSTAL DEFECTS;
CRYSTAL STRUCTURE;
MICROCHANNELS;
OPTICAL MICROSCOPY;
SYNCHROTRON RADIATION;
CONTRAST WIDTHS;
SCREW DISLOCATIONS;
WHITE BEAM SYNCHROTRON RADIATION SOURCE;
X-RAY DIFFRACTION TOPOGRAPHY (XRDT);
SILICON CARBIDE;
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EID: 34247578065
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/0-87849-963-6.311 Document Type: Conference Paper |
Times cited : (4)
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References (16)
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