Flow property measurements for nanoimprint simulation

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 928-931

  Leveder, T ^a   Landis, S ^a   Davoust, L ^b   Chaix, N ^c  

^a CEA LETI   (France)

^b Centre National de la Recherche Scientifique   (France)

^c CNRS   (France)

Author keywords

Flow properties; Nanoimprint lithography; Thermal imprint

Indexed keywords

GLASS TRANSITION; NANOIMPRINT LITHOGRAPHY; POLYMER FILMS; VISCOSITY;

FLOW PROPERTIES; NANOIMPRINT SIMULATION; THERMAL IMPRINT;

FLOW MEASUREMENT;

FLOW MEASUREMENT; GLASS TRANSITION TEMPERATURE; LITHOGRAPHY; POLYMERS; VISCOSITY;

EID: 34247569497     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.065     Document Type: Article

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