Deep-trench vertical Si photodiode towards active-device integrated OMEMS

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Volumn , Issue , 2006, Pages 191-192

  Hirose, K ^a   Mita, Y ^a   Kubota, M ^a   Shibata, T ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Deep trench; DRIE; Vertical photodiode

Indexed keywords

ELECTROOPTICAL DEVICES; MEMS; SILICON;

DEEP TRENCH; VERTICAL PHOTODIODES;

PHOTODIODES;

EID: 34247521534     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/omems.2006.1708330     Document Type: Conference Paper

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