High Aspect Ratio Nano-structures (HARNS) for photonic MEMS based on vertical DBR architecture

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 384-387

  Marty, Frédéric ^a   Saadany, Bassam ^a   Bourouina, Tarik ^a   Mita, Yoshio ^b   Shibata, Tadashi ^b  

^a ESIEE PARIS   (France)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

DBR; DRIE; HARNS; Photonic MEMS

Indexed keywords

DISTRIBUTED BRAGG REFLECTORS (DBR); DRIE; HIGH ASPECT RATIO NANO-STRUCTURES (HARNS); PHOTONIC MEMS;

ASPECT RATIO; LIGHT PROPAGATION; NANOSTRUCTURED MATERIALS; OPTICAL SYSTEMS; SEPARATION; SILICON;

MICROELECTROMECHANICAL DEVICES;

EID: 27544470339     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496436     Document Type: Conference Paper

References (11)

1. Patents DE4241045, US 5501893 and EP 625285, authors: Franz Lärmer, Andrea Schilp.
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3. M.J. de Boer, J.G.E. Gardeniers, H.V.Jansen, E. Smulders, M.J. Gilde, G. Roelofs, J.N. Sasserath, M. Elwenspoek, 'Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures'. IEEE/ASME J. Microelectromech. Syst., Vol.11 No 4 (2002) 385-401
4. M. Kubota, Y. Mita, K. Ito, F. Marty, T. Bourouina and T. Shibata, «A Contour-Lithography Technology for Rapid and Precise Deep-Etched Nano-MEMS Structure Fabrication » TRANSDUCERS'05 conference, Seoul, June (2005)
5. K. Ito, Y. Mita, M. Kubota, F. Marty, T. Bourouina « Electrical Critical Dimension Measurement Method by Integration of Test Structure into MEMS Devices » TRANSDUCERS'05 conference, Seoul, June (2005)
6. J.H. Lee, S. Yun « Micromachined in-plane tunable optical filter using thermo-optic effect ». Proceedings of SPIE Vol. #4983, January (2003)
7. B. Saadany, T. Bourouina, D. Khalil, "Design of a MEMS Tunable Optical Filter Based on a Novel Vertical DBR Architecture", MEMSWAVE Conference, Toulouse, France, July (2003).
8. S.S. Yun, K.W. Jo and J.H. Lee « Crystalline Si-based In-plane Tunable Fabry-Perot Filter with Wide Tunable Range » IEEE/LEOS Optical MEMS and their applications, Hawaii, August 19 (2003)
9. S.S. Yun and J.H. Lee "A micromachined in-plane tunable optical filter using the thermo-optic effect of crystalline silicon". J. Micromech. Microeng. 13 (2003) 721-725
10. B. Saadany, F. Marty, Y. Mita, D. Khalil and T. Bourouina, 'A MEMS Tunable Optical Filter Based on Vertical DBR Architecture'. DTIP'04; Design, Test, Integration and Packaging of MEMS and MOEMS, Montreux, Switzerland, May 12-14 (2004).
11. F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, T. Bourouina "Advanced Silicon Etching Techniques Based on Deep Reactive Ion Etching (DRIE) for Silicon HARMS and 3D Micro-and Nano-Structures", ASME/European Micro and Nanosystem Conference EMN'04, Paris, October 20-21 (2004) 25-28