Atomic force microscopy studies of cross-sections of columnar thin films

Measurement Science and Technology

Volumn 18, Issue 2, 2007, Pages 528-531

  Klapetek, P ^a   Ohlidal I ^b   Burik J ^c  

^a CZECH METROLOGY INSTITUTE   (Czech Republic)

^b MASARYK UNIVERSITY   (Czech Republic)

^c INSTITUTE OF PHYSICS OF MATERIALS   (Czech Republic)

Author keywords

Atomic force microscopy; Columnar structure

Indexed keywords

ATOMIC FORCE MICROSCOPY; IMAGE ANALYSIS; MICROHARDNESS; SILICON WAFERS; SUBSTRATES; SURFACE TREATMENT;

ARTIFICIAL DEFECTS; COLUMNAR STRUCTURE; COLUMNAR THIN FILMS;

THIN FILMS;

ATOMIC FORCE MICROSCOPY; IMAGE ANALYSIS; MICROHARDNESS; SILICON WAFERS; SUBSTRATES; SURFACE TREATMENT; THIN FILMS;

EID: 34247274722     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/2/S28     Document Type: Conference Paper

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