메뉴 건너뛰기




Volumn 15, Issue 8, 2007, Pages 4435-4444

Absolute three-dimensional coordinate measurement by the two-point diffraction interferometry

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; ERROR CORRECTION; INTERFEROMETRY; MEASUREMENT ERRORS; OPTIMIZATION; THREE DIMENSIONAL;

EID: 34247270275     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.15.004435     Document Type: Article
Times cited : (19)

References (21)
  • 1
    • 0001333023 scopus 로고    scopus 로고
    • Grating interferometer for flatness testing
    • P. de Groot, "Grating interferometer for flatness testing," Opt. Lett. 21, 228-230 (1996).
    • (1996) Opt. Lett , vol.21 , pp. 228-230
    • de Groot, P.1
  • 2
    • 84975589602 scopus 로고
    • Two-wavelength laser interferometry using superheterodyne detection
    • R. Dändliker, R. Thalmann, and D. Prongué, "Two-wavelength laser interferometry using superheterodyne detection," Opt. Lett. 13, 339-341 (1988).
    • (1988) Opt. Lett , vol.13 , pp. 339-341
    • Dändliker, R.1    Thalmann, R.2    Prongué, D.3
  • 3
    • 0040029477 scopus 로고
    • Two-wavelength double heterodyne interferometry using a matched grating technique
    • Z. Sodnik, E. Fischer, T. Ittner, and H. J. Tiziani, "Two-wavelength double heterodyne interferometry using a matched grating technique," Appl. Opt. 30, 3139-3144(1991).
    • (1991) Appl. Opt , vol.30 , pp. 3139-3144
    • Sodnik, Z.1    Fischer, E.2    Ittner, T.3    Tiziani, H.J.4
  • 4
    • 84975629121 scopus 로고
    • Distance measurement by the wavelength shift of laser diode light
    • H. Kikuta, K. Iwata, and R. Nagata, "Distance measurement by the wavelength shift of laser diode light," Appl. Opt. 25, 2976-2980 (1986).
    • (1986) Appl. Opt , vol.25 , pp. 2976-2980
    • Kikuta, H.1    Iwata, K.2    Nagata, R.3
  • 5
    • 84975586767 scopus 로고
    • Absolute distance measurement by wavelength shift interferometry with a laser diode light: Some systematic error sources
    • H. Kikuta, K. Iwata, and R. Nagata, "Absolute distance measurement by wavelength shift interferometry with a laser diode light: some systematic error sources," Appl. Opt. 26, 1654-1660 (1987).
    • (1987) Appl. Opt , vol.26 , pp. 1654-1660
    • Kikuta, H.1    Iwata, K.2    Nagata, R.3
  • 6
    • 0029292201 scopus 로고
    • White-light scanning fiber Michelson interferometer for absolute position-distance measurement
    • T. Li, A. Wang, K. Merphy, and R. Claus, "White-light scanning fiber Michelson interferometer for absolute position-distance measurement," Opt. Lett. 20, 785-787 (1995).
    • (1995) Opt. Lett , vol.20 , pp. 785-787
    • Li, T.1    Wang, A.2    Merphy, K.3    Claus, R.4
  • 7
    • 0000587172 scopus 로고    scopus 로고
    • Dispersive white-light interferometry for absolute distance measurement with dielectric multilayer systems on the target
    • U. Schnell and R. Dändliker, "Dispersive white-light interferometry for absolute distance measurement with dielectric multilayer systems on the target," Opt. Lett. 21, 528-530 (1996).
    • (1996) Opt. Lett , vol.2 , Issue.1 , pp. 528-530
    • Schnell, U.1    Dändliker, R.2
  • 9
    • 2542420794 scopus 로고    scopus 로고
    • Absolute measurement of long, arbitrary distance to less than an optical fringe
    • J. Ye, "Absolute measurement of long, arbitrary distance to less than an optical fringe," Opt. Lett. 29, 1153-1155 (2004).
    • (2004) Opt. Lett , vol.29 , pp. 1153-1155
    • Ye, J.1
  • 10
    • 0003426303 scopus 로고    scopus 로고
    • High-accuracy measurement of 240-m distance in an optical tunnel by use of a compact femtosecond laser
    • K. Minoshima, and H. Matsumoto, "High-accuracy measurement of 240-m distance in an optical tunnel by use of a compact femtosecond laser," Appl. Opt. 39, 5512-5517 (2000).
    • (2000) Appl. Opt , vol.39 , pp. 5512-5517
    • Minoshima, K.1    Matsumoto, H.2
  • 11
    • 0022440391 scopus 로고
    • Automatic laser tracking interferometer system for robot metrology
    • K. Lau, R. J. Hocken, and W. C. Haight, "Automatic laser tracking interferometer system for robot metrology," Prec. Eng. 8, 3-8 (1986).
    • (1986) Prec. Eng , vol.8 , pp. 3-8
    • Lau, K.1    Hocken, R.J.2    Haight, W.C.3
  • 12
    • 0025897963 scopus 로고
    • Development of a coordinate measuring system with tracking laser interferometer
    • O. Nakamura, M. Goto, K. Toyoda, Y. Tanimura, and T. Kurosawa, "Development of a coordinate measuring system with tracking laser interferometer," Annals of CIRP 40, 523-526 (1991).
    • (1991) Annals of CIRP , vol.40 , pp. 523-526
    • Nakamura, O.1    Goto, M.2    Toyoda, K.3    Tanimura, Y.4    Kurosawa, T.5
  • 13
    • 0033713693 scopus 로고    scopus 로고
    • Design of a high-accuracy CMM based on multi-lateration techniques
    • E. B. Hughes, A Wilson, and G. N. Peggs, "Design of a high-accuracy CMM based on multi-lateration techniques," Annals of CIRP 49, 391-394 (2000).
    • (2000) Annals of CIRP , vol.49 , pp. 391-394
    • Hughes, E.B.1    Wilson, A.2    Peggs, G.N.3
  • 14
    • 0036504698 scopus 로고    scopus 로고
    • High-performance laser tracker using an articulation mirror for the calibration of coordinate measuring machine
    • H. Jiang, S. Osawa, T. Takatsuji, H. Noguchi, and T. Kurosawa, "High-performance laser tracker using an articulation mirror for the calibration of coordinate measuring machine," Opt. Eng. 41, 632-637 (2002).
    • (2002) Opt. Eng , vol.41 , pp. 632-637
    • Jiang, H.1    Osawa, S.2    Takatsuji, T.3    Noguchi, H.4    Kurosawa, T.5
  • 15
    • 0036795313 scopus 로고    scopus 로고
    • Absolute distance measurement by two-point diffraction interferometry
    • H.G. Rhee, and S.W. Kim, "Absolute distance measurement by two-point diffraction interferometry," Appl. Opt. 41, 5921-5928 (2002).
    • (2002) Appl. Opt , vol.41 , pp. 5921-5928
    • Rhee, H.G.1    Kim, S.W.2
  • 16
    • 33745471972 scopus 로고    scopus 로고
    • Absolute distance measurement by lateral shearing interferometry of point-diffracted spherical waves
    • J. Chu, and S. W. Kim, "Absolute distance measurement by lateral shearing interferometry of point-diffracted spherical waves," Opt. Express 14, 5961-5967 (2006).
    • (2006) Opt. Express , vol.14 , pp. 5961-5967
    • Chu, J.1    Kim, S.W.2
  • 17
    • 0030694908 scopus 로고    scopus 로고
    • An exact algorithm for self-calibration of two-dimensional precision metrology stages
    • J. Ye, M. Takac, C. N. Berglund, G. Owen, and R. F. Pease, "An exact algorithm for self-calibration of two-dimensional precision metrology stages," Free. Eng. 20, 16-32 (1997).
    • (1997) Free. Eng , vol.20 , pp. 16-32
    • Ye, J.1    Takac, M.2    Berglund, C.N.3    Owen, G.4    Pease, R.F.5
  • 19
    • 7544236215 scopus 로고    scopus 로고
    • Nonparaxial free-space diffraction from oblique end faces of single-mode optical fibers
    • H. Kihm, and S. W. Kim, "Nonparaxial free-space diffraction from oblique end faces of single-mode optical fibers," Opt. Lett. 29, 2366-2368 (2004).
    • (2004) Opt. Lett , vol.29 , pp. 2366-2368
    • Kihm, H.1    Kim, S.W.2
  • 20
    • 84894402158 scopus 로고    scopus 로고
    • ISO, Guide to the expression of uncertainty in measurement, in International vocabulary of basic and general terms in metrology, International Organization for Standardization ed. (International Organization for Standardization, Switzerland, 1993).
    • ISO, "Guide to the expression of uncertainty in measurement," in International vocabulary of basic and general terms in metrology, International Organization for Standardization ed. (International Organization for Standardization, Switzerland, 1993).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.