-
2
-
-
0003972070
-
-
6th ed. (Pergamon, New York, Chap
-
M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, New York, 1989), Chap. 7.
-
(1989)
Principles of Optics
, pp. 7
-
-
Born, M.1
Wolf, E.2
-
3
-
-
0020133159
-
Interferometric optical metrology: Basic principles and new systems
-
J. C. Wyant, “Interferometric optical metrology: basic principles and new systems,” Laser Focus 18, 65-71 (1982).
-
(1982)
Laser Focus
, vol.18
, pp. 65-71
-
-
Wyant, J.C.1
-
4
-
-
84971649875
-
Fourier description of digital phase-measuring interferometry
-
K. Freischlad and C. L. Koliopoulos, “Fourier description of digital phase-measuring interferometry,” J. Opt. Soc. Am. A 7, 542-551 (1990).
-
(1990)
J. Opt. Soc. Am. A
, vol.7
, pp. 542-551
-
-
Freischlad, K.1
Koliopoulos, C.L.2
-
5
-
-
77955701859
-
Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window
-
P. de Groot, “Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window,” Appl. Opt. 34, 4723-4730 (1995).
-
(1995)
Appl. Opt.
, vol.34
, pp. 4723-4730
-
-
De Groot, P.1
-
6
-
-
0027662910
-
Recent advances in displacement measuring interferometry
-
N. Bobroff, “Recent advances in displacement measuring interferometry,” Meas. Sci. Technol. 4, 907-926 (1993), and references therein.
-
(1993)
Meas. Sci. Technol
, vol.4
, pp. 907-926
-
-
Bobroff, N.1
-
7
-
-
0001333023
-
Grating interferometer for flatness testing
-
P. de Groot, “Grating interferometer for flatness testing,” Opt. Lett. 21, 228-230 (1996).
-
(1996)
Opt. Lett.
, vol.21
, pp. 228-230
-
-
De Groot, P.1
-
8
-
-
0001584983
-
Optical ranging by wavelength multiplexed interferometry
-
C. C. Williams and H. K. Wickramasinghe, “Optical ranging by wavelength multiplexed interferometry,” J. Appl. Phys. 60, 1900-1903 (1986).
-
(1986)
J. Appl. Phys.
, vol.60
, pp. 1900-1903
-
-
Williams, C.C.1
Wickramasinghe, H.K.2
-
9
-
-
0040029477
-
Two-wavelength double heterodyne interferometry using a matched grating technique
-
Z. Sodnik, E. Fischer, T. Ittner, and H. J. Tiziani, “Two-wavelength double heterodyne interferometry using a matched grating technique,” Appl. Opt. 30, 3139 -3144 (1991).
-
(1991)
Appl. Opt.
, vol.30
-
-
Sodnik, Z.1
Fischer, E.2
Ittner, T.3
Tiziani, H.J.4
-
10
-
-
0029292201
-
White-light scanning fiber Michelson interferometer for absolute position-distance measurement
-
T. Li, A. Wang, K. Murphy, and R. Claus, “White-light scanning fiber Michelson interferometer for absolute position-distance measurement,” Opt. Lett. 20, 785-787 (1995).
-
(1995)
Opt. Lett.
, vol.20
, pp. 785-787
-
-
Li, T.1
Wang, A.2
Murphy, K.3
Claus, R.4
-
11
-
-
0000587172
-
Dispersive white-light interferometry for absolute distance measurement with dielectric multilayer systems on the target
-
U. Schnell and R. Dandliker, “Dispersive white-light interferometry for absolute distance measurement with dielectric multilayer systems on the target,” Opt. Lett. 21, 528-530 (1996).
-
(1996)
Opt. Lett.
, vol.21
, pp. 528-530
-
-
Schnell, U.1
Dandliker, R.2
-
12
-
-
84975629121
-
Distance measurement by the wavelength shift of laser diode light
-
H. Kikuta, K. Iwata, and R. Nagata, “Distance measurement by the wavelength shift of laser diode light,” Appl. Opt. 25, 2976-2980 (1986).
-
(1986)
Appl. Opt.
, vol.25
, pp. 2976-2980
-
-
Kikuta, H.1
Iwata, K.2
Nagata, R.3
-
13
-
-
84975586767
-
Absolute distance measurement by wavelength shift interferometry with a laser diode light: Some systematic error sources
-
H. Kikuta, K. Iwata, and R. Nagata, “Absolute distance measurement by wavelength shift interferometry with a laser diode light: some systematic error sources,” Appl. Opt. 26, 1654-1660 (1987).
-
(1987)
Appl. Opt.
, vol.26
, pp. 1654-1660
-
-
Kikuta, H.1
Iwata, K.2
Nagata, R.3
-
14
-
-
84975565191
-
Interferometric laser rangefinder using a frequency modulated diode laser
-
A. J. den Boef, “Interferometric laser rangefinder using a frequency modulated diode laser,” Appl. Opt. 26, 4545-4550 (1987).
-
(1987)
Appl. Opt.
, vol.26
, pp. 4545-4550
-
-
Den Boef, A.J.1
-
15
-
-
0000433108
-
Absolute interferometric distance measurement using a FM-demodulation technique
-
E. Fischer, E. Dalhoff, S. Heim, U. Hofbauer, and H. J. Tiziani, “Absolute interferometric distance measurement using a FM-demodulation technique,” Appl. Opt. 34, 5589-5594 (1995).
-
(1995)
Appl. Opt.
, vol.34
, pp. 5589-5594
-
-
Fischer, E.1
Dalhoff, E.2
Heim, S.3
Hofbauer, U.4
Tiziani, H.J.5
-
16
-
-
0001199708
-
Absolute interferometry with a 670-nm external cavity diode laser
-
J. A. Stone, A. Stejskal, and L. Howard, “Absolute interferometry with a 670-nm external cavity diode laser,” Appl. Opt. 38, 5981-5994 (1999).
-
(1999)
Appl. Opt.
, vol.38
, pp. 5981-5994
-
-
Stone, J.A.1
Stejskal, A.2
Howard, L.3
-
17
-
-
0034963657
-
New design of precision CMM based upon volumetric phase-measuring interferometry
-
S. W. Kim, “New design of precision CMM based upon volumetric phase-measuring interferometry,” Ann. CIRP 51, 357-360 (2001).
-
(2001)
Ann. CIRP
, vol.51
, pp. 357-360
-
-
Kim, S.W.1
-
18
-
-
0025897963
-
Development of a coordinate measuring system with tracking laser interferometer
-
O. Nakamura, M. Goto, K. Toyoda, Y. Tanimura, and T. Kurosawa, “Development of a coordinate measuring system with tracking laser interferometer,” Ann. CIRP 40, 523-526 (1991).
-
(1991)
Ann. CIRP
, vol.40
, pp. 523-526
-
-
Nakamura, O.1
Goto, M.2
Toyoda, K.3
Tanimura, Y.4
Kurosawa, T.5
-
19
-
-
0033713693
-
Design of a high-accuracy CMM based on multi-lateration techniques
-
E. B. Hughes, A. Wilson, and G. N. Peggs, “Design of a high-accuracy CMM based on multi-lateration techniques,” Ann. CIRP 49, 391-394 (2000).
-
(2000)
Ann. CIRP
, vol.49
, pp. 391-394
-
-
Hughes, E.B.1
Wilson, A.2
Peggs, G.N.3
-
20
-
-
0003806707
-
-
Prentice-Hall, Upper Saddle River, N.J
-
A. D. Belegundu and T. R. Chandrupatla, Optimization Concepts and Applications in Engineering (Prentice-Hall, Upper Saddle River, N.J., 1999), pp. 74-79.
-
(1999)
Optimization Concepts and Applications in Engineering
, pp. 74-79
-
-
Belegundu, A.D.1
Chandrupatla, T.R.2
-
21
-
-
0004041275
-
-
Prentice-Hall, Englewood Cliffs, N.J
-
J. E. Dennis and R. B. Schnabel, Numerical Methods for Unconstrained Optimization and Nonlinear Equations (Prentice-Hall, Englewood Cliffs, N.J., 1983), pp. 116-133.
-
(1983)
Numerical Methods for Unconstrained Optimization and Nonlinear Equations
, pp. 116-133
-
-
Dennis, J.E.1
Schnabel, R.B.2
-
22
-
-
0003718423
-
-
Prentice-Hall, Englewood Cliffs, N.J
-
A. Ishimaru, Electromagnetic Wave Propagation, Radiation, and Scattering (Prentice-Hall, Englewood Cliffs, N.J., 1991), pp. 156-161.
-
(1991)
Electromagnetic Wave Propagation, Radiation, and Scattering
, pp. 156-161
-
-
Ishimaru, A.1
-
23
-
-
84975645664
-
Confocal scanning optical microscope using single-mode fiber for signal detection
-
S. Kimura and T. Wilson, “Confocal scanning optical microscope using single-mode fiber for signal detection,” Appl. Opt. 30, 2143-2150 (1991).
-
(1991)
Appl. Opt.
, vol.30
, pp. 2143-2150
-
-
Kimura, S.1
Wilson, T.2
-
24
-
-
0000289592
-
General algorithm of phase-shifting interferometry by iterative least-squares fitting
-
I. -B. Kong and S.-W. Kim, “General algorithm of phase-shifting interferometry by iterative least-squares fitting,” Opt. Eng. 34, 183-188 (1995).
-
(1995)
Opt. Eng.
, vol.34
, pp. 183-188
-
-
Kong, I.-B.1
Kim, S.-W.2
-
25
-
-
0012593604
-
Fourier-transform method of phase-shift determination
-
K. A. Goldberg and J. Bokor, “Fourier-transform method of phase-shift determination,” Appl. Opt. 40, 2886-2894 (2001).
-
(2001)
Appl. Opt.
, vol.40
, pp. 2886-2894
-
-
Goldberg, K.A.1
Bokor, J.2
-
26
-
-
0018335226
-
The Abbe principle revisited: An updated interpretation
-
J. B. Bryan, “The Abbe principle revisited: an updated interpretation, Precis. Eng. 1, 129-132 (1979).
-
(1979)
Precis. Eng
, vol.1
, pp. 129-132
-
-
Bryan, J.B.1
-
27
-
-
85010179517
-
Guide to the expression of uncertainty in measurement
-
2nd ed. (International Organization for Standardization, Geneva, Switzerland
-
International Organization for Standardization, “Guide to the expression of uncertainty in measurement,” in International Vocabulary of Basic and General Terms in Metrology, 2nd ed. (International Organization for Standardization, Geneva, Switzerland, 1993).
-
International Vocabulary of Basic and General Terms in Metrology
, pp. 1993
-
-
|