메뉴 건너뛰기




Volumn 41, Issue 28, 2002, Pages 5921-5928

Absolute distance measurement by two-point-diffraction interferometry

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0036795313     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.005921     Document Type: Article
Times cited : (33)

References (27)
  • 2
    • 0003972070 scopus 로고
    • 6th ed. (Pergamon, New York, Chap
    • M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, New York, 1989), Chap. 7.
    • (1989) Principles of Optics , pp. 7
    • Born, M.1    Wolf, E.2
  • 3
    • 0020133159 scopus 로고
    • Interferometric optical metrology: Basic principles and new systems
    • J. C. Wyant, “Interferometric optical metrology: basic principles and new systems,” Laser Focus 18, 65-71 (1982).
    • (1982) Laser Focus , vol.18 , pp. 65-71
    • Wyant, J.C.1
  • 4
    • 84971649875 scopus 로고
    • Fourier description of digital phase-measuring interferometry
    • K. Freischlad and C. L. Koliopoulos, “Fourier description of digital phase-measuring interferometry,” J. Opt. Soc. Am. A 7, 542-551 (1990).
    • (1990) J. Opt. Soc. Am. A , vol.7 , pp. 542-551
    • Freischlad, K.1    Koliopoulos, C.L.2
  • 5
    • 77955701859 scopus 로고
    • Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window
    • P. de Groot, “Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window,” Appl. Opt. 34, 4723-4730 (1995).
    • (1995) Appl. Opt. , vol.34 , pp. 4723-4730
    • De Groot, P.1
  • 6
    • 0027662910 scopus 로고
    • Recent advances in displacement measuring interferometry
    • N. Bobroff, “Recent advances in displacement measuring interferometry,” Meas. Sci. Technol. 4, 907-926 (1993), and references therein.
    • (1993) Meas. Sci. Technol , vol.4 , pp. 907-926
    • Bobroff, N.1
  • 7
    • 0001333023 scopus 로고    scopus 로고
    • Grating interferometer for flatness testing
    • P. de Groot, “Grating interferometer for flatness testing,” Opt. Lett. 21, 228-230 (1996).
    • (1996) Opt. Lett. , vol.21 , pp. 228-230
    • De Groot, P.1
  • 8
    • 0001584983 scopus 로고
    • Optical ranging by wavelength multiplexed interferometry
    • C. C. Williams and H. K. Wickramasinghe, “Optical ranging by wavelength multiplexed interferometry,” J. Appl. Phys. 60, 1900-1903 (1986).
    • (1986) J. Appl. Phys. , vol.60 , pp. 1900-1903
    • Williams, C.C.1    Wickramasinghe, H.K.2
  • 9
    • 0040029477 scopus 로고
    • Two-wavelength double heterodyne interferometry using a matched grating technique
    • Z. Sodnik, E. Fischer, T. Ittner, and H. J. Tiziani, “Two-wavelength double heterodyne interferometry using a matched grating technique,” Appl. Opt. 30, 3139 -3144 (1991).
    • (1991) Appl. Opt. , vol.30
    • Sodnik, Z.1    Fischer, E.2    Ittner, T.3    Tiziani, H.J.4
  • 10
    • 0029292201 scopus 로고
    • White-light scanning fiber Michelson interferometer for absolute position-distance measurement
    • T. Li, A. Wang, K. Murphy, and R. Claus, “White-light scanning fiber Michelson interferometer for absolute position-distance measurement,” Opt. Lett. 20, 785-787 (1995).
    • (1995) Opt. Lett. , vol.20 , pp. 785-787
    • Li, T.1    Wang, A.2    Murphy, K.3    Claus, R.4
  • 11
    • 0000587172 scopus 로고    scopus 로고
    • Dispersive white-light interferometry for absolute distance measurement with dielectric multilayer systems on the target
    • U. Schnell and R. Dandliker, “Dispersive white-light interferometry for absolute distance measurement with dielectric multilayer systems on the target,” Opt. Lett. 21, 528-530 (1996).
    • (1996) Opt. Lett. , vol.21 , pp. 528-530
    • Schnell, U.1    Dandliker, R.2
  • 12
    • 84975629121 scopus 로고
    • Distance measurement by the wavelength shift of laser diode light
    • H. Kikuta, K. Iwata, and R. Nagata, “Distance measurement by the wavelength shift of laser diode light,” Appl. Opt. 25, 2976-2980 (1986).
    • (1986) Appl. Opt. , vol.25 , pp. 2976-2980
    • Kikuta, H.1    Iwata, K.2    Nagata, R.3
  • 13
    • 84975586767 scopus 로고
    • Absolute distance measurement by wavelength shift interferometry with a laser diode light: Some systematic error sources
    • H. Kikuta, K. Iwata, and R. Nagata, “Absolute distance measurement by wavelength shift interferometry with a laser diode light: some systematic error sources,” Appl. Opt. 26, 1654-1660 (1987).
    • (1987) Appl. Opt. , vol.26 , pp. 1654-1660
    • Kikuta, H.1    Iwata, K.2    Nagata, R.3
  • 14
    • 84975565191 scopus 로고
    • Interferometric laser rangefinder using a frequency modulated diode laser
    • A. J. den Boef, “Interferometric laser rangefinder using a frequency modulated diode laser,” Appl. Opt. 26, 4545-4550 (1987).
    • (1987) Appl. Opt. , vol.26 , pp. 4545-4550
    • Den Boef, A.J.1
  • 15
    • 0000433108 scopus 로고
    • Absolute interferometric distance measurement using a FM-demodulation technique
    • E. Fischer, E. Dalhoff, S. Heim, U. Hofbauer, and H. J. Tiziani, “Absolute interferometric distance measurement using a FM-demodulation technique,” Appl. Opt. 34, 5589-5594 (1995).
    • (1995) Appl. Opt. , vol.34 , pp. 5589-5594
    • Fischer, E.1    Dalhoff, E.2    Heim, S.3    Hofbauer, U.4    Tiziani, H.J.5
  • 16
    • 0001199708 scopus 로고    scopus 로고
    • Absolute interferometry with a 670-nm external cavity diode laser
    • J. A. Stone, A. Stejskal, and L. Howard, “Absolute interferometry with a 670-nm external cavity diode laser,” Appl. Opt. 38, 5981-5994 (1999).
    • (1999) Appl. Opt. , vol.38 , pp. 5981-5994
    • Stone, J.A.1    Stejskal, A.2    Howard, L.3
  • 17
    • 0034963657 scopus 로고    scopus 로고
    • New design of precision CMM based upon volumetric phase-measuring interferometry
    • S. W. Kim, “New design of precision CMM based upon volumetric phase-measuring interferometry,” Ann. CIRP 51, 357-360 (2001).
    • (2001) Ann. CIRP , vol.51 , pp. 357-360
    • Kim, S.W.1
  • 18
    • 0025897963 scopus 로고
    • Development of a coordinate measuring system with tracking laser interferometer
    • O. Nakamura, M. Goto, K. Toyoda, Y. Tanimura, and T. Kurosawa, “Development of a coordinate measuring system with tracking laser interferometer,” Ann. CIRP 40, 523-526 (1991).
    • (1991) Ann. CIRP , vol.40 , pp. 523-526
    • Nakamura, O.1    Goto, M.2    Toyoda, K.3    Tanimura, Y.4    Kurosawa, T.5
  • 19
    • 0033713693 scopus 로고    scopus 로고
    • Design of a high-accuracy CMM based on multi-lateration techniques
    • E. B. Hughes, A. Wilson, and G. N. Peggs, “Design of a high-accuracy CMM based on multi-lateration techniques,” Ann. CIRP 49, 391-394 (2000).
    • (2000) Ann. CIRP , vol.49 , pp. 391-394
    • Hughes, E.B.1    Wilson, A.2    Peggs, G.N.3
  • 23
    • 84975645664 scopus 로고
    • Confocal scanning optical microscope using single-mode fiber for signal detection
    • S. Kimura and T. Wilson, “Confocal scanning optical microscope using single-mode fiber for signal detection,” Appl. Opt. 30, 2143-2150 (1991).
    • (1991) Appl. Opt. , vol.30 , pp. 2143-2150
    • Kimura, S.1    Wilson, T.2
  • 24
    • 0000289592 scopus 로고
    • General algorithm of phase-shifting interferometry by iterative least-squares fitting
    • I. -B. Kong and S.-W. Kim, “General algorithm of phase-shifting interferometry by iterative least-squares fitting,” Opt. Eng. 34, 183-188 (1995).
    • (1995) Opt. Eng. , vol.34 , pp. 183-188
    • Kong, I.-B.1    Kim, S.-W.2
  • 25
    • 0012593604 scopus 로고    scopus 로고
    • Fourier-transform method of phase-shift determination
    • K. A. Goldberg and J. Bokor, “Fourier-transform method of phase-shift determination,” Appl. Opt. 40, 2886-2894 (2001).
    • (2001) Appl. Opt. , vol.40 , pp. 2886-2894
    • Goldberg, K.A.1    Bokor, J.2
  • 26
    • 0018335226 scopus 로고
    • The Abbe principle revisited: An updated interpretation
    • J. B. Bryan, “The Abbe principle revisited: an updated interpretation, Precis. Eng. 1, 129-132 (1979).
    • (1979) Precis. Eng , vol.1 , pp. 129-132
    • Bryan, J.B.1
  • 27
    • 85010179517 scopus 로고    scopus 로고
    • Guide to the expression of uncertainty in measurement
    • 2nd ed. (International Organization for Standardization, Geneva, Switzerland
    • International Organization for Standardization, “Guide to the expression of uncertainty in measurement,” in International Vocabulary of Basic and General Terms in Metrology, 2nd ed. (International Organization for Standardization, Geneva, Switzerland, 1993).
    • International Vocabulary of Basic and General Terms in Metrology , pp. 1993


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.