Monolithic CMOS-compatible AlGaInP visible LED arrays on silicon on lattice-engineered substrates (SOLES)

Semiconductor Science and Technology

Volumn 22, Issue 2, 2007, Pages 29-34

  Chilukuri, Kamesh ^a   Mori, Michael J ^a   Dohrman, Carl L ^a   Fitzgerald, Eugene A ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; CMOS INTEGRATED CIRCUITS; ETCHING; LATTICE CONSTANTS; OPTOELECTRONIC DEVICES; SILICON WAFERS;

MONOLITHIC CMOS; SILICON ON LATTICE-ENGINEERED SUBSTRATE (SOLES); VIRTUAL SUBSTRATE TECHNOLOGY;

LIGHT EMITTING DIODES;

EID: 34247264447     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/22/2/006     Document Type: Article

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