Determination of tungsten layer profiles in bilayer structures using x-ray reflectivity method

Chinese Physics Letters

Volumn 24, Issue 2, 2007, Pages 366-369

  Xu, Yao ^a   Wang, Zhan Shan ^a   Wang, Bei ^a   Wang, Hong Chang ^a   Wu, Wen Juan ^a   Zhang, Shu Min ^a   Zhang, Zhong ^a   Wang, Feng Li ^a   Qin, Shu Ji ^a   Chen, Ling Yan ^a  

^a TONGJI UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BORON CARBIDE; GENETIC ALGORITHMS; REFLECTION; TUNGSTEN;

BI-LAYER; BI-LAYER STRUCTURE; CAPPING LAYER; DIFFERENT THICKNESS; MULTILAYER STRUCTURES; OXIDATION EFFECTS; REFLECTIVITY METHODS; TUNGSTEN LAYERS; X RAY REFLECTIVITY; X-RAY REFLECTIVITY TECHNIQUES;

DEPOSITION RATES;

EID: 34247212256     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/24/2/018     Document Type: Article

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