A novel six degrees-of-freedom parallel robot for MEMS fabrication

IEEE Transactions on Robotics

Volumn 23, Issue 2, 2007, Pages 189-195

  Bamberger, Hagay ^a,b   Shoham, Moshe ^b  

^a RAFAEL   (Israel)

^b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Microactuators; Microelectromechanical devices; Parallel mechanism; Robot kinematics

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); KINEMATICS; MEMS; MICROACTUATORS;

PARALLEL MECHANISM; PASSIVE JOINTS; REVOLUTE JOINTS;

ROBOTICS;

EID: 34247204680     PISSN: 15523098     EISSN: None     Source Type: Journal    
DOI: 10.1109/TRO.2006.889493     Document Type: Article

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