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Volumn 38, Issue 4, 2007, Pages 427-435
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Characterization of laser processing of single-crystal natural diamonds using micro-Raman spectroscopic investigations
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Author keywords
Benching process; Kerf; Laser processing; MEMS (microelectromechanical systems); MOEMS (microoptoelectromechanical systems); Natural diamond
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Indexed keywords
DIODES;
GRAPHITE;
LASER MATERIALS PROCESSING;
MEMS;
MICROELECTRONICS;
MICROMACHINING;
NEODYMIUM LASERS;
PUMPING (LASER);
Q SWITCHING;
QUALITY CONTROL;
SCANNING ELECTRON MICROSCOPY;
SILICON WAFERS;
SURFACE PROPERTIES;
YTTRIUM ALUMINUM GARNET;
1064 NM;
BEAM PARAMETER;
BENCHING PROCESS;
KERF;
LASER PROCESS;
MICRO-RAMAN;
MICROELECTROMECHANICAL SYSTEM;
MICROOPTOELECTROMECHANICAL SYSTEM;
NATURAL DIAMONDS;
ND:YAG LASER;
SINGLE CRYSTALS;
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EID: 34247168449
PISSN: 03770486
EISSN: 10974555
Source Type: Journal
DOI: 10.1002/jrs.1663 Document Type: Article |
Times cited : (22)
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References (40)
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