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Volumn 25, Issue 3, 2007, Pages 850-860

Resonant polymeric waveguide cantilever integrated for optical scanning

Author keywords

2 D optical scanner; Optical waveguide; Resonant cantilever; SU 8

Indexed keywords

LIGHT ABSORPTION; LIGHT SCATTERING; LIGHT SOURCES; NATURAL FREQUENCIES; SCANNING; SURFACE ROUGHNESS;

EID: 34247147754     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2006.889676     Document Type: Article
Times cited : (19)

References (16)
  • 2
    • 0345714586 scopus 로고    scopus 로고
    • Microfabricated optical fiber with microlens that produces large field-of-view video-rate optical beam scanning for microendoscopy applications
    • E. J. Seibel et al., "Microfabricated optical fiber with microlens that produces large field-of-view video-rate optical beam scanning for microendoscopy applications," Proc. SPIE - Int. Soc. Opt. Eng., Vol. 4957, pp. 46-55, 2003.
    • (2003) Proc. SPIE - Int. Soc. Opt. Eng , vol.4957 , pp. 46-55
    • Seibel, E.J.1
  • 3
    • 0036896808 scopus 로고    scopus 로고
    • Micromachined optical waveguide cantilever as a resonant optical scanner
    • Dec. 1
    • W.-C. Wang, M. Fauver, J. Ho, E. J. Seibel, and P. G. Reinhall, "Micromachined optical waveguide cantilever as a resonant optical scanner," Sens. Actuators A, Phys., vol. A102, no. 1/2, pp. 165-75, Dec. 1, 2002.
    • (2002) Sens. Actuators A, Phys , vol.A102 , Issue.1-2 , pp. 165-175
    • Wang, W.-C.1    Fauver, M.2    Ho, J.3    Seibel, E.J.4    Reinhall, P.G.5
  • 5
    • 5544250999 scopus 로고    scopus 로고
    • Design and test of a microfabricated SU-8 optical scanner
    • W.-C. Wang and R. R. Panergo, "Design and test of a microfabricated SU-8 optical scanner," Proc. SPIE - Int. Soc. Opt. Eng., Vol. 5394, no. 1, pp. 280-287, 2004.
    • (2004) Proc. SPIE - Int. Soc. Opt. Eng , vol.5394 , Issue.1 , pp. 280-287
    • Wang, W.-C.1    Panergo, R.R.2
  • 6
    • 34247149038 scopus 로고    scopus 로고
    • 1995, Boulder, CO: Rocky Mountain Res. Lab, private communication
    • C. J. Kaufman, May 1995, Boulder, CO: Rocky Mountain Res. Lab., private communication.
    • Kaufman, C.J.1    May2
  • 10
    • 0346093695 scopus 로고    scopus 로고
    • Single-mode TE/sub 00/-TM/sub 00/optical waveguides on SU-8 polymer
    • Jan. 15
    • B. Beche, N. Pelletier, E. Gaviot, and J. Zyss, "Single-mode TE/sub 00/-TM/sub 00/optical waveguides on SU-8 polymer," Opt. Commun., Vol. 230, no. 1-3, pp. 91-94, Jan. 15, 2004.
    • (2004) Opt. Commun , vol.230 , Issue.1-3 , pp. 91-94
    • Beche, B.1    Pelletier, N.2    Gaviot, E.3    Zyss, J.4
  • 11
    • 34247124859 scopus 로고    scopus 로고
    • NANOTM SU-8 2000 Negative Tone Photoresists Formulations 2002 2025
    • Online, Available
    • MicroChem (2005). MicroChem Product Data Sheet for SU-8 2007. NANOTM SU-8 2000 Negative Tone Photoresists Formulations 2002 2025. pp. 25-75. [Online]. Available: http://www.microchem.com/
    • (2005) , pp. 25-75
    • MicroChem1
  • 12
    • 24644458412 scopus 로고    scopus 로고
    • 4th ed. Englewood Cliffs, NJ: Prentice-Hall
    • R. Singiresu, Mechanical Vibrations, 4th ed. Englewood Cliffs, NJ: Prentice-Hall, 2004.
    • (2004) Mechanical Vibrations
    • Singiresu, R.1
  • 13
    • 34247137584 scopus 로고    scopus 로고
    • Micromechanical testing of SU-8 cantilevers
    • Sep
    • M. Hopcroft et al., "Micromechanical testing of SU-8 cantilevers," in Proc. JSME Adv. Technol. Exp. Mech., Sep. 2003, pp. 735-742.
    • (2003) Proc. JSME Adv. Technol. Exp. Mech , pp. 735-742
    • Hopcroft, M.1
  • 14
    • 0037341009 scopus 로고    scopus 로고
    • Fabrication and characterization of an SU-8 gripper actuated by a shape memory alloy thin film
    • Mar
    • I. Roch et al., "Fabrication and characterization of an SU-8 gripper actuated by a shape memory alloy thin film," J. Micromech. Microeng., vol. 13, no. 2, pp. 330-336, Mar. 2003.
    • (2003) J. Micromech. Microeng , vol.13 , Issue.2 , pp. 330-336
    • Roch, I.1
  • 15
    • 0004169758 scopus 로고
    • Guided-Wave Optoelectronics
    • 2nd ed, New York: Springer-Verlag, Dec
    • T. Tamir, Guided-Wave Optoelectronics, 2nd ed. ser. Springer Series in Electronics and Photonics, Vol. 26. New York: Springer-Verlag, Dec. 1990.
    • (1990) ser. Springer Series in Electronics and Photonics , vol.26
    • Tamir, T.1
  • 16
    • 0031363701 scopus 로고    scopus 로고
    • A review on fabrication technologies for the monolithic integration of tapers with III-V semiconductor devices
    • I. Moerman, P. P. Van Daele, and P. M. Demeester, "A review on fabrication technologies for the monolithic integration of tapers with III-V semiconductor devices," IEEE J. Sel. Topics Quantum Electron. vol. 3, no. 6, pp. 1308-1320, 1997.
    • (1997) IEEE J. Sel. Topics Quantum Electron , vol.3 , Issue.6 , pp. 1308-1320
    • Moerman, I.1    Van Daele, P.P.2    Demeester, P.M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.