Design and test of a microfabricated SU-8 optical scanner

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5394, Issue , 2004, Pages 280-287

  Wang, Wei Chih ^a   Panergo, Reynold ^a  

^a University of Washington   (United States)

Author keywords

Cantilever; Endoscope; Image acquisition; Optical mems; SU 8

Indexed keywords

ADHESION; CAMERAS; CANTILEVER BEAMS; CHARGE COUPLED DEVICES; ENDOSCOPY; EPOXY RESINS; FABRICATION; IMAGE RETRIEVAL; OPTICAL PROPERTIES; OPTICAL WAVEGUIDES; THICKNESS CONTROL; ULTRASONIC APPLICATIONS;

IMAGE AQUISITION; OPTICAL COUPLING; OPTICAL MEMS; SU-8;

MULTISPECTRAL SCANNERS;

EID: 5544250999     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.538349     Document Type: Conference Paper

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