Si nanocrystals in silicon nitride: An ellipsometric study using parametric semiconductor models

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 38, Issue 1-2, 2007, Pages 76-79

  Basa, P ^a   Petrik, P ^a   Fried, M ^a   Dobos, L ^a   Pecz B ^a   Toth L ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

Dielectric function; Si nanocrystals; Spectroscopic ellipsometry

Indexed keywords

LOW PRESSURE CHEMICAL VAPOR DEPOSITION; SEMICONDUCTOR DEVICE MODELS; SILICON NITRIDE; SPECTROSCOPIC ELLIPSOMETRY; SUBSTRATES;

MODEL DIELECTRIC FUNCTION (MDF); PARAMETRIC SEMICONDUCTOR MODELS; SI NANOCRYSTALS;

NANOCRYSTALS;

EID: 34147140494     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physe.2006.12.021     Document Type: Article

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