Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films

Diamond and Related Materials

Volumn 16, Issue 4-7 SPEC. ISS., 2007, Pages 1331-1335

  Franta, Daniel ^a   Buršíková, Vilma ^a   Ohlídal, Ivan ^a   Sťahel, Pavel ^a   Ohlídal, Miloslav ^b   Nečas, David ^a  

^a MASARYK UNIVERSITY   (Czech Republic)

^b BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

Author keywords

Electronic structure; Free carrier anisotropy; Optical constants; Thermal stability

Indexed keywords

ANISOTROPY; ANNEALING; MECHANICAL PROPERTIES; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THERMODYNAMIC STABILITY;

ATOMIC FRACTION; FREE-CARRIER ANISOTROPY; INTRINSIC STRESS;

DIAMOND LIKE CARBON FILMS;

EID: 34047247021     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.12.021     Document Type: Article

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