Emission characteristics of nanocrystalline porous silicon ballistic cold cathode in atmospheric ambience

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 2, 2007, Pages 524-527

  Ohta, Toshiyuki ^a   Kojima, Akira ^b   Koshida, Nobuyoshi ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

^b Quantum14 Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC GAS AMBIENCES; COLLECTOR ELECTRODES; OXYGEN MOLECULES; POLYSILICON LAYERS;

ANNEALING; ATMOSPHERIC PRESSURE; ELECTRON EMISSION; FIELD EMISSION; NANOCRYSTALLINE MATERIALS; POLYSILICON; POROUS SILICON; WATER VAPOR;

CATHODES;

EID: 34047176470     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2433949     Document Type: Article

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