Operation of nanocrystalline silicon ballistic emitter in low vacuum and atmospheric pressures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 2336-2339

  Ohta, Toshiyuki ^a   Kojima, Akira ^a,b   Hirakawa, Hiroyuki ^c   Iwamatsu, Tadashi ^c   Koshida, Nobuyoshi ^a,b  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

^b Quantum14 Co Ltd   (Japan)

^c SHARP CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; CATHODES; POLYMERS; SIGNAL DETECTION; SILICON; THIN FILMS; VACUUM;

COLLECTOR VOLTAGE; ENERGETIC ELECTRON; POLYSILICON LAYERS; SILICON BALLISTIC EMITTER;

NANOSTRUCTURED MATERIALS;

EID: 29044432526     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2102928     Document Type: Article

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