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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 3, 2004, Pages 1372-1376

Correlation between nanostructure and electron emission characteristics of a ballistic electron surface-emitting device

(4) Ichihara, Tsutomu a Baba, Toru a Komoda, Takuya a Koshida, Nobuyoshi b

a PANASONIC CORPORATION (Japan)

b TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; DIODES; ELECTRIC FIELDS; ELECTRON SCATTERING; ENERGY DISPERSIVE SPECTROSCOPY; NANOSTRUCTURED MATERIALS; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYSILICON; SILICA; TRANSMISSION ELECTRON MICROSCOPY; VACUUM APPLICATIONS;

ANODIZATION; BALLISTIC ELECTRON SURFACE-EMITTING DEVICE (BSD); ELECTROCHEMICAL OXIDATION (ECO); HIGH EMISSION EFFICIENCY;

ELECTRON EMISSION;

EID: 3242728792 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1710489 Document Type: Conference Paper

Times cited : (28)

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