A new sensor for the thermo-optical detection of surface plasmon resonance

Sensors and Actuators, A: Physical

Volumn 135, Issue 2, 2007, Pages 492-501

  Brantzen, S ^a,b   Volklein F ^b   Knoll, W ^a   Menges, B ^a  

^a MAX PLANCK INSTITUTE FOR POLYMER RESEARCH   (Germany)

^b RHEINMAIN UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

Grating coupler; MOEMS; Supramolecular architectures; Surface plasmon resonance; Thermal sensor

Indexed keywords

COMPUTER SIMULATION; ELECTRIC EXCITATION; FINITE ELEMENT METHOD; MICROMECHANICS; SURFACE PLASMON RESONANCE; THERMOANALYSIS; THIN FILMS;

GRATING COUPLER; MOEMS; SUPRAMOLECULAR ARCHITECTURES; THERMAL SENSORS;

OPTICAL SENSORS;

EID: 34047163666     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.09.024     Document Type: Article

References (35)

1. Bursein E., Chen W.P., Chen Y.J., and Hartstein A.J. Vac. Sci. Technol. 11 (1972) 1004-1019
2. Raether H. Springer Tracts in Modern Physics vol. 111 (1988), Springer-Verlag, Berlin
3. In: Knoll W., Hummel R.E., and Wissmann P. (Eds). Handbook of Optical Properties, vol. II, Optics of Small Particles, Interfaces and Surfaces (1997), CRC Press, Boca Raton
4. Garland P.B. Q. Rev. Biophys. 29 (1996) 91-117
5. Bohn P. Ann. Rev. Mater. Sci. 27 (1997) 469-498
6. Knoll W. Ann. Rev. Phys. Chem. 49 (1998) 565-634
7. Homola J., Yee S.S., and Gauglitz G. Sens. Actuators B 54 (1999) 3-15
8. Weisser M., Menges B., and Mittler S. SPIE 3414 (1998) 509-516
9. Jung C.C., Saban S.B., and Yee S.S. Sens. Actuator B 35/36 (1996) 37-43
10. Laschtisch A., Menges B., and Johannsmann D. Appl. Phys. Lett. 77 (2000) 2252-2254
11. Hickel W., Rothenhäusler B., and Knoll W. J. Appl. Phys. 66 (1989) 4832-4836
12. Zizlsberger M., and Knoll W. Prog. Colloid Polym. Sci. 109 (1998) 244-253
13. Katayama K., and Sawada T. Phys. Rev. B 58 (1998) 8428-8436
14. Inagaki T., Motosuga M., and Yamamori K. Photoacoustic study of plasmon resonance absorption in a diffraction grating. Phys. Rev. B 28 (1983) 1740-1744
15. Rothenhäuser B., Rabe J., Korpiun P., and Knoll W. On the decay of plasmon surface polaritons at smooth and rough Ag-air interfaces: a reflectance and photo-acoustic study. Surf. Sci. 137 (1984) 373-383
16. Innes R.A., and Samples J.R. Simple thermal detection of surface plasmon-polaritons. Solid State Commun. 56 (1985) 493-496
17. Völklein F. Thermal-based microsensors. In: Paul O., and Korvink J. (Eds). MEMS-A Practical Guide to Design, Analysis and Applications (2005), Springer (Chapter 7)
18. van Herwaarden A.W., and Sarro P.M. Sens. Actuators 10 (1986) 321-346
19. Völklein F., Wiegand A., and Baier V. Sens. Actuators A 29 (1991) 87-91
20. Schieferdecker J., Quad R., Holzenkämpfer E., and Schulze M. Sens. Actuators A 46-47 (1995) 422-427
21. Simon M., Schieferdecker J., Schulze M., Gottfried-Gottfried R., Müller M., and Jähne R. Proc. Sensor 97, vol. 2. Nürnberg (1997) 83-88
22. Cole B.E., Higashi R.E., and Wood R.A. Monolithic two-dimensional arrays of micromachined microstructures for infrared applications. Proc. IEEE 86 (1998) 1679-1686
23. Völklein F., and Kessler E. Proceedings of XVII International Conference on Thermoelectrics. Nagoya (1998) 214-217
24. van Oudheusden B.W., and van Herwaarden A.W. High-sensitivity 2-D flow sensor with an etched thermal isolation structure. Sens. Actuators A 21-23 (1990) 423-430
25. Moser D., Lenggenhager R., and Baltes H. Silicon gas flow sensors using industrial CMOS and bipolar IC technology. Sens. Actuators A 25-27 (1991) 577-581
26. van Herwaarden A.W., van Duyn D.C., and Groeneweg J. Small-size vacuum sensors based on silicon thermopiles. Sens. Actuators A 25-27 (1991) 565-569
27. Völklein F., and Schnelle W. A vacuum microsensor for the low-vacuum range. Sens. Mater. 3 (1991) 41-48
28. Verhaegen K., Baert K., Simaels J., and Driessche W.V. A high-throughput silicon microphysiometer. Sens. Actuators 82 (2000) 186-190
29. Johannessen E.A., et al. Micromachined nanocalorimetric sensor for ultra-low-volume cell-based assays. Anal. Chem. 74 (2002) 2190-2197
30. J. Lerchner et al., Chip-Kalorimeter zur online-Detektion biomolekularer Prozesse, 7. Dresdener Sensor-Symposium der Forschungsgesellschaft Messtechnik, Sensorik und Medizintechnik, Dresden, 2005.
31. Wilchek M., and Bayer E.A. Anal. Biochem. 171 (1998) 1-6
32. x films with 0 < x < 0.3. Thin Solid Films 155 (1987) 197-203
33. Partial Differential Equation Toolbox User's Guide, The MathWorks Inc., 2002 www.mathworks.com.
34. Knoll W., Zizlsperger M., Liebermann T., Arnold S., Badia A., Liley M., Piscevic D., Schmitt F.-J., and Spinke J. Colloids and surfaces A: Physicochem. Eng. Aspects 161 (2000) 115-137
35. Busse S., Scheumann V., Menges B., and Mittler S. Biosens. Bioelectron. 17 (2002) 704-710