Thermoelectric microsensor for heat flux measurement

International Conference on Thermoelectrics, ICT, Proceedings

Volumn , Issue , 1998, Pages 214-217

  Voelklein, Friedemann ^a   Kessler, Ernst ^a  

^a RHEINMAIN UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FILM PREPARATION; HEAT FLUX; MICROMACHINING; MICROSENSORS; PHOTOLITHOGRAPHY; SEMICONDUCTING BISMUTH COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICA; SILICON NITRIDE; SILICON WAFERS; THIN FILM DEVICES;

HEAT FLUX SENSORS; INTEGRATED THIN-FILM HEATER;

THERMOELECTRIC EQUIPMENT;

EID: 0032294558     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)