Multiple replication of three dimensional structures with undercuts

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 1, 2007, Pages 247-251

  Mollenbeck S ^a   Bogdanski, N ^a   Wissen, M ^a   Scheer, H C ^a   Zajadacz, J ^a,b   Zimmer, K ^a,b  

^a UNIVERSITY OF WUPPERTAL   (Germany)

^b LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; LASER ABLATION; MOLDING; MOLECULAR STRUCTURE; PHOTORESISTS; WET ETCHING;

ANISOTROPIC WET ETCHING; ELASTOMERIC REPLICA; ELASTOMERIC STRUCTURES;

ELASTOMERS;

EID: 34047151481     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2433965     Document Type: Article

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6. N. Roos et al., Proc. SPIE 4688, 232 (2002).
7. Technical data sheet, http://www.swiss-composite.ch
8. Technical data sheet, Dow Corning, Ref. No. 10-1204A-03, 1999.
9. Technical data sheet, http://www.microresist.de/epocore_epoclad_2005_de. htm