Protection of circuits in MEMS post-processing with ABS

Dianzi Qijian/Journal of Electron Devices

Volumn 28, Issue 2, 2005, Pages 242-244

  Cao, Zheng Jun ^a   Qin, Ming ^a  

^a Southeast University   (China)

Author keywords

ABS film; Protection of circuits; Silicon etching

Indexed keywords

EID: 20444403025     PISSN: 10059490     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)