Modifications of AlN thin films by ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 257, Issue 1-2 SPEC. ISS., 2007, Pages 433-437

  Matsunami, N ^a   Shimura, T ^a   Tazawa, M ^b   Kusumori, T ^b   Kakiuchida, H ^b   Ikeyama, M ^b   Chimi, Y ^c   Sataka, M ^c  

^a NAGOYA UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

AlN film on R Al2O3 substrate; Interface reaction; N ion irradiation

Indexed keywords

ALUMINUM COMPOUNDS; CRYSTAL STRUCTURE; FILM GROWTH; FILM THICKNESS; ION BOMBARDMENT; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

OPTICAL REFLECTIVITY SPECTROSCOPY; SIMULATION CODE;

THIN FILMS;

EID: 33947710632     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.01.043     Document Type: Article

References (14)

1. Webb A.P., and Townsend P.D. J. Phys. D: Appl. Phys. 9 (1976) 1343
2. Hosono H. J. Non-Cryst. Solids 187 (1995) 457
3. Matsunami N., Murase T., Tazawa M., Ninad S., Fukuoka O., Shimura T., Sataka M., and Chimi Y. Nucl. Instr. and Meth. B 249 (2006) 185
4. Shinde N., Matsunami N., Fukuoka O., Tazawa M., Shimura T., Chimi Y., and Sataka M. J. Nucl. Sci. Technol. 43 (2006) 382
5. Lee Y.J. J. Cryst. Growth 266 (2004) 568
6. Mortet V., Vasin A., Jouan P.-Y., Elmazria O., and Djouadi M.-A. Surf. Coat. Technol. 176 (2003) 88
7. Yonenaga I. Physica B 308-310 (2001) 1150
8. Ziegler J.F., Biersack J.P., and Littmark U. The Stopping and Range of Ions in Solids (1985), Pergamon Press, New York
9. Tompkins H.G., and McGahan W.A. Spectroscopic Ellipsometry and Reflectometry (1999), John Wiley & Sons, New York
10. N. Matsunami, M. Sataka, S. Okayasu, M. Tazawa, Nucl. Instr. and Meth. B, in press, doi:10.1016/j.nimb.2006.12.022.
11. In: Martienssen W., and Warlimont H. (Eds). Handbook of Condensed Matter and Materials Data (2005), Springer
12. Albert J., Malo B., Hill K.O., Johnson D.C., Brebner J.L., and Leonelli R. Opt. Lett. 17 (1992) 1652
13. Matsunami N., Fukuoka O., Tazawa M., and Sataka M. Surf. Coat. Technol. 196 (2005) 50
14. Shinde N.S., Matsunami N., Shimura T., Sataka M., Okayasu S., Kato T., and Tazawa M. Nucl. Instr. and Meth. B 245 (2006) 231