Electronic structure modification of ZnO and Al-doped ZnO films by ions

Surface and Coatings Technology

Volumn 196, Issue 1-3 SPEC. ISS., 2005, Pages 50-55

  Matsunami, Noriaki ^a   Fukuoka, Osamu ^a   Tazawa, Masato ^b   Sataka, Masao ^c  

^a NAGOYA UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

Electric and optical properties; Grain growth; Ion irradiation; ZnO and Al doped ZnO films

Indexed keywords

ABSORPTION; ALUMINUM; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; ELECTRIC EXCITATION; ELECTRONIC STRUCTURE; IONS; LIGHT ABSORPTION;

AL-DOPED ZNNO (AZO) FILMS; ELASTIC COLLISIONS; ION-INDUCED GROWTH; OPTICAL ABSORPTION EDGE;

ZINC OXIDE;

ELECTRICAL PROPERTY;

EID: 18144386842     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.08.093     Document Type: Article

References (18)

1. W. Hirschwald P. Bonasewicz L. Ernst M. Grade D. Hofmann S. Kerbs R. Littbarski G. Neumann M. Grunze D. Kolb H.J. Schultz Current Topics in Materials Science vol 7 1981 North-Holland (Chap. 3)
2. T. Minami T. Miyata T. Yamamoto J. Vac. Sci. Technol. A17 1999 1822
3. R.J. Hong X. Jiang B. Szyszka V. Sittinger S.H. Xu W. Werner G. Heide J. Cryst. Growth 253 2003 117
4. K. Tamura T. Makino A. Tsukazaki M. Sumiya S. Fuke T. Furumochi M. Lippmaa C.H. Chia Y. Segawa H. Koimuma M. Kawasaki Solid State Commun. 127 2003 265
5. G.H. Lee Y. Yamamoto M. Kourogi M. Ohtsu Thin Solid Films 386 2001 117
6. S.V. Prasad S.D. Walck J.S. Zabinski Thin Solid Films 360 2000 107
7. J.F. Chang H.H. Kuo I.C. Leu M.H. Hon Sens. Actuators B84 2002 258
8. Y.S. Chang J.M. Ting Thin Solid Films 398-399 2001 29
9. B. Wessler A. Steinecker W. Mader J. Cryst. Growth 242 2002 283
10. N. Matsunami 7th Int. Conf. on Applications of Nuclear Technique, Crete, Greece 2001, June
11. M. Itoh, Ion Irradiation Effects on ZnO Thin Films, Thesis of Bachelor's Degree, 2002. Nagoya, University.
12. O. Fukuoka N. Matsunami T. Shimura M. Tazawa M. Sataka Trans. Mater. Res. Soc. Jpn. 29 2004 639
13. N. Matsunami T. Yajima H. Iwahara Nucl. Instrum. Methods B65 1993 276
14. J.F. Ziegler J.P. Biersack U. Littmark The Stopping and Range of Ions in Solids 1985 Pergamonn New York
15. N. Matsunami M. Itoh Y. Takai M. Tazawa M. Sataka Nucl. Instrum. Methods B206 2003 282
16. A. Ohtomo M. Kawasaki T. Koida K. Masubuchi H. Koinuma Y. Sakurai Y. Yoshida T. Yasuda Y. Segawa Appl. Phys. Lett. 72 1998 2466
17. D.R. Locker J.M. Meese IEEE Trans. Nucl. Sci. 19 1972 237
18. A. Ohtomo K. Tamura K. Saikusa K. Takahashi T. Makino Y. Segawa H. Koinuma M. Kawasaki Appl. Phys. Lett. 75 1999 2635