Adhesion improvement of TiN film on tool steel by a hybrid process of unbalanced magnetron sputtering and plasma-based ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 257, Issue 1-2 SPEC. ISS., 2007, Pages 786-789

  Ono, T ^a   Uemura, M ^a   Yatsuzuka, M ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Adhesive strength; Interfacial mixing layer; PBII; Ti plasma; TiN; UBM

Indexed keywords

ADHESION; DEPOSITION; ION IMPLANTATION; MAGNETRON SPUTTERING; STEEL; SUBSTRATES; TITANIUM NITRIDE;

ADHESIVE STRENGTH; INTERFACIAL MIXING LAYERS; PLASMA BASED ION IMPLANTATION; PLASMA-BASED ION IMPLANTATION (PBII); UNBALANCED MAGNETRON SPUTTERING (UBM);

THIN FILMS;

EID: 33947671504     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.01.088     Document Type: Article

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