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Thin Solid Films

Volumn 493, Issue 1-2, 2005, Pages 152-159

Effects of pretreatment by ion implantation and interlayer on adhesion between aluminum substrate and TiN film

(9) Liu, Youming a,c Li, Liuhe a,b Cai, Xun a Chen, Qiulong a Xu, Ming a Hu, Yawei a Cheung, Tik Lam c Shek, C H c Chu, Paul K c

a SHANGHAI JIAO TONG UNIVERSITY (China)

b BEIHANG UNIVERSITY (China)

c CITY UNIVERSITY OF HONG KONG (Hong Kong)

Author keywords

Acoustic emission; Adhesion; Implantation; Titanium nitride

Indexed keywords

ACOUSTIC EMISSIONS; ADHESION; ALUMINUM; COATING TECHNIQUES; MAGNETRON SPUTTERING; TITANIUM NITRIDE;

ADHESION STRENGTH; COATING ADHESION; MULTIFUNCTIONAL ION IMPLANTER;

ION IMPLANTATION;

EID: 27144502082 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.06.045 Document Type: Article

Times cited : (31)

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