The influence of ion implantation on the properties of titanium nitride layer deposited by magnetron sputtering

Surface and Coatings Technology

Volumn 156, Issue 1-3, 2002, Pages 159-161

  Ruset, C ^a   Grigore, E ^a  

^a NATIONAL INSTITUTE FOR LASER   (Romania)

Author keywords

Glow discharge spectrometry; Ion implantation; Magnetron sputtering; Super hard layers

Indexed keywords

ADHESION; DEPOSITION; ION IMPLANTATION; MAGNETRON SPUTTERING; TITANIUM NITRIDE;

SUBSTRATE INTERFACE;

COATING TECHNIQUES;

CORROSION RESISTANCE; HARDNESS; ION IMPLANTATION; TITANIUM NITRIDE; WEAR RESISTANCE;

EID: 0036641612     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00121-4     Document Type: Article

References (5)

1. Ion implantation of tools: Curiosity or commercial process?
2. Plasma source ion-implantation technique for surface modification of materials
3. Advances in PSII techniques for surface modification
4. Recent advances in surface processing with metal plasma and ion beams