Multi-dipolar plasmas for plasma-based ion implantation and plasma-based ion implantation and deposition

Surface and Coatings Technology

Volumn 186, Issue 1-2 SPEC. ISS., 2004, Pages 170-176

  Bechu S ^a   Maulat, O ^a   Arnal, Y ^a   Vempaire, D ^a   Lacoste, A ^a   Pelletier, J ^a  

^a UNIV GRENOBLE ALPES   (France)

Author keywords

DECR; Elementary plasma; PBII

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; PHYSICAL VAPOR DEPOSITION; PLASMA APPLICATIONS; SPUTTER DEPOSITION;

DISTRIBUTED ELECTRON CYCLOTRON RESONANCE (DECR); MULTI-DIPOLAR PLASMAS; PLASMA BASED ION IMPLANTATION (PBII); STANDING WAVES;

ION IMPLANTATION;

PLASMA TREATMENT;

EID: 17644420703     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.04.036     Document Type: Article

References (30)

1. Mändl S. Günzel R. Möller W. Plasma Sources Sci. Technol. 5 1996 54
2. Mändl S. Brutscher J. Günzel R. Möller W. J. Vac. Sci. Technol., B 14 1996 2701
3. Le Cœur F. Pelletier J. Arnal Y. Lacoste A. Surf. Coat. Technol. 125 2000 71
4. Pelletier J. Le Cœur F. Arnal Y. Lacoste A. Surf. Coat. Technol. 136 2001 7
5. Pelletier J. Lacoste A. Arnal Y. Lagarde T. Lincot C. Hertz D. Surf. Coat. Technol. 139 2001 222
6. Lacoste A. Lagarde T. Béchu S. Arnal Y. Pelletier J. Plasma Sources Sci. Technol. 11 2002 407
7. IMöller W. in: Schlüter H. Shivarova A. (Eds.), Advanced Technologies Based on Wave and Beam Generated Plasmas 1999 191-244 Kluwer Academic Publishing Dordrecht
8. Mändl S. Reuther H. Brutscher J. Günzel R. Möller W. Surf. Coat. Technol. 93 1997 229
9. Yu C. Cheung N.W. IEEE Electron Device Lett. 15 1994 196
10. Linder B.P. Cheung N.W. IEEE Trans. Plasma Sci. 24 1996 1383
11. Lacoste A. Le Cœur F. Arnal Y. Pelletier J. Grattepain C. Surf. Coat. Technol. 135 2001 268
12. Lacoste A. Pelletier J. Nucl. Instrum. Methods, B 208 2003 260
13. Kwok D.T.K. Bilek M.M.M. McKenzie D.R. Chu P.K. Appl. Phys. Lett. 82 2003 1827
14. Pichot M. Durandet A. Pelletier J. Arnal Y. Vallier L. Rev. Sci. Instrum. 59 1988 1072
15. Pichot M. Pelletier J. Moisan M. Pelletier J. (Eds.), Microwave Excited Plasmas 1992 419 434 Elsevier Amsterdam
16. in: Pelletier J. Popov O. (Eds.), High density plasma sources: design, physics and performance 1995 380 425 Noyes Publications Park Ridge, NJ
17. Lagarde T. Pelletier J. Arnal Y. Plasma Sources Sci. Technol. 6 1997 53
18. Le Cœur F. Arnal Y. Burke R. Lesaint O. Pelletier J. Surf. Coat. Technol. 93 1997 265
19. in: Pelletier J. Anders A. (Eds.), Handbook of Plasma Immersion Ion Implantation and Deposition 2000 409-430 Wiley New-York
20. Le Cœur F. Lagarde T. Pelletier J. Arnal Y. Burke R. Brunel M. Rev. Sci. Instrum. 69 1998 831
21. Lacoste A. Béchu S. Arnal Y. Pelletier J. Vallée C. Gouttebaron R. Stoquert J.P. Surf. Coat. Technol. 156 2002 125
22. D. Vempaire J. Pelletier D. Fruchart S. Miraglia S. Béchu Y. Arnal Y. Plasma-based ion implantation: A. valuable industrial route for the elaboration of innovative materials submitted to (subitted to Surf. Coat. Technol./PBII 2003)
23. Lacoste A. Béchu S. Arnal Y. Pelletier J. Gouttebaron R. Surf. Coat. Technol. 156 2002 225
24. Thièry F. Pauleau Y. Arnal Y. Pelletier J. Ortega L. Mater. Res. Soc. Proc. 750 2002 343
25. Vempaire D. Arnal Y. Béchu S. Maulat O. Pelletier J. 14th Int. Coll. Plasma Processes, CIP 2003, Antibes, France (June 29-July 3, 2003) 2003 [Proceedings pp 000-000]
26. F. Thièry, C. Vallée, Y. Arnal, J. Pelletier, PECVD and PIID processing of diamond-like carbon (submitted to Surf. Coat. Technol./PBII 2003).
27. Thièry F. Pauleau Y. Pelletier J. Grob J.-J. Mater. Res. Soc. Proc. 750 2002 155
28. Pauleau Y. Thièry F. Pelletier J. Uglov V.V. Kuleshov A.K. Dub S.N. Samstov M.P. Anishchik V.M. Cherenda N.N. Adv. Mater. 5 2002 13
29. in: Pauleau Y. Thièry F. Pelletier J. Uglov V.V. Kuleshov A.K. Dub S.N. Samstov M.P. Gogotsi Y.G. Uvarova I.V. (Eds.), Nanostructured Materials and Coatings for Biomedical and Sensor Applications NATO Science Series. Series II, Mathematics, Physics and Chemistry vol. 102 2003 175 180 Kluwer Academic Publishing Dordrecht, The Netherlands
30. Uglov V.V. Anishchik V.M. Pauleau Y. Kuleshov A.K. Thièry F. Pelletier J. Dub S.N. Rusalsky D.P. Vacuum 70 2003 181