Theoretical study of the pyrolysis of methyltrichlorosilane in the gas phase. 1. Thermodynamics

Journal of Physical Chemistry A

Volumn 111, Issue 8, 2007, Pages 1462-1474

  Yingbin, Ge ^a   Gordon, Mark S ^a   Battaglia, Francine ^b   Fox, Rodney O ^b  

^a IOWA STATE UNIVERSITY   (United States)

^b Iowa State University of Science and Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METHYLTRICHLOROSILANE; PARTITION FUNCTIONS; SINGLE POINT ENERGIES;

CHEMICAL VAPOR DEPOSITION; ENTHALPY; ENTROPY; GIBBS FREE ENERGY; PERTURBATION TECHNIQUES; PYROLYSIS; ROTORS; SPECIFIC HEAT; THERMODYNAMIC PROPERTIES;

CHLORINE COMPOUNDS;

HYDROGEN; INORGANIC COMPOUND; METHYLTRICHLOROSILANE; SILANE DERIVATIVE; SILICON CARBIDE; SILICON DERIVATIVE; UNCLASSIFIED DRUG;

ARTICLE; CHEMISTRY; TEMPERATURE; THERMODYNAMICS;

CARBON COMPOUNDS, INORGANIC; HYDROGEN; SILANES; SILICON COMPOUNDS; TEMPERATURE; THERMODYNAMICS;

EID: 33947421295     PISSN: 10895639     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp065453q     Document Type: Article

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