Electrical properties of annealed a-SiC:H thin films

Journal of Non-Crystalline Solids

Volumn 353, Issue 11-12, 2007, Pages 1065-1069

  Magafas, L ^a   Bandekas, D ^a   Boglou, A K ^a   Anagnostopoloulos, A N ^b  

^a TECHNOLOGICAL EDUCATIONAL INSTITUTE OF KAVALA   (Greece)

^b ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Conductivity; Silicon; Sputtering

Indexed keywords

ACTIVATION ENERGY; AMORPHOUS MATERIALS; ANNEALING; ELECTRIC CONDUCTIVITY; SILICON CARBIDE; SPUTTERING;

MATERIAL QUALITY; MEYER-NELDER RULE; ROOM TEMPERATURE;

THIN FILMS;

EID: 33947365196     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2006.12.025     Document Type: Article

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