Piezoresistance of suspended InAs/AlGaSb heterostructure nanobeam

Journal of Crystal Growth

Volumn 301-302, Issue SPEC. ISS., 2007, Pages 897-901

  Yamazaki, Kenji ^a   Etaki, Samir ^b   van der Zant, Herre S J ^b   Yamaguchi, Hiroshi ^a,c  

^a Bio Medical Informatics Research Center   (Japan)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c TOHOKU UNIVERSITY   (Japan)

Author keywords

A1. Nanostructures; A3. Molecular beam epitaxy; B2. Semiconducting indium compounds; B3. Nanoelectromechanical systems (NEMS); B3. Piezoresistive sensor

Indexed keywords

ELECTRIC RESISTANCE; ELECTRON BEAM LITHOGRAPHY; LATTICE MISMATCH; PIEZOELECTRICITY; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING INDIUM COMPOUNDS;

NANOBEAMS; NANOMECHANICAL SENSORS; PIEZORESISTANCE COEFFICIENT; PIEZORESISTIVE SENSORS;

NEMS;

EID: 33947331532     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2006.11.161     Document Type: Article

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