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Volumn 10, Issue 5, 2007, Pages 43-46
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Selectivity enhancement of electroless Co deposition for Cu capping process via spontaneous diazonium ion reduction
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Author keywords
[No Author keywords available]
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Indexed keywords
CARBON;
ELECTRIC RESISTANCE;
ELECTROLESS PLATING;
INFRARED RADIATION;
IONS;
REDUCTION;
SCANNING ELECTRON MICROSCOPY;
X RAY PHOTOELECTRON SPECTROSCOPY;
CAPPING PROCESS;
DIAZONIUM ION REDUCTION;
ORGANIC MOLECULES;
SELECTIVITY ENHANCEMENT;
COPPER;
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EID: 33947329491
PISSN: 10990062
EISSN: None
Source Type: Journal
DOI: 10.1149/1.2709400 Document Type: Article |
Times cited : (14)
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References (18)
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