Characteristics of (Pb,Sr)TiO3/ZrO2 structures on Si and SiON/Si substrates

Applied Physics Letters

Volumn 90, Issue 11, 2007, Pages

  Chen, Hung Yao ^a   Wu, Jenn Ming ^a   Huang, Hsin Erh ^b   Bor, Hui Yun ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE INJECTION; FERROELECTRIC MATERIALS; HYSTERESIS LOOPS; INSULATION; LEAD COMPOUNDS; LEAKAGE CURRENTS; MAGNETRON SPUTTERING; SILICON; SUBSTRATES;

FERROELECTRIC POLARIZATION; INJECTION EFFECTS; SEMICONDUCTOR STRUCTURES;

THIN FILMS;

EID: 33947317587     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2712807     Document Type: Article

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