Determination of ZnO temperature coefficients using thin film bulk acoustic wave resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 49, Issue 11, 2002, Pages 1491-1496

  Pinkett, Shawn L ^a   Hunt, William D ^a   Barber, Bradely P ^b   Gammel, Peter L ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b AGERE SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; COMPUTER SIMULATION; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; THERMAL EFFECTS; THIN FILMS; ZINC OXIDE;

TEMPERATURE COEFFICIENTS; THIN FILM BULK ACOUSTIC WAVE RESONATORS;

ACOUSTIC RESONATORS;

ALUMINUM; ALUMINUM DERIVATIVE; ALUMINUM NITRIDE; SILICON; SILICON DIOXIDE; ZINC OXIDE;

ACOUSTICS; ARTICLE; CHEMICAL MODEL; CHEMISTRY; COMPARATIVE STUDY; ELECTROCHEMISTRY; EQUIPMENT DESIGN; IMPEDANCE; INSTRUMENTATION; MATERIALS TESTING; METHODOLOGY; MICROWAVE RADIATION; TEMPERATURE; THEORETICAL MODEL;

ACOUSTICS; ALUMINUM; ALUMINUM COMPOUNDS; ELECTRIC IMPEDANCE; ELECTROCHEMISTRY; EQUIPMENT DESIGN; MATERIALS TESTING; MICROWAVES; MODELS, CHEMICAL; MODELS, THEORETICAL; SILICON; SILICON DIOXIDE; TEMPERATURE; ZINC OXIDE;

EID: 0036827062     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2002.1049730     Document Type: Article

References (11)

1. K. M. Lakin, G. R. Kline, and K. T. McCarron, "Development of miniature filters for wireless applications," IEEE Trans. Microwave Theory Tech., vol. 43, pp. 2933-2939, Dec. 1995.
2. K. M. Lakin, K. T. McCarron, and J. F. McDonald, "Temperature compensated bulk acoustic thin film resonators," in Proc. IEEE Ultrason. Symp., 2000, pp. 855-858.
3. K. Lakin, G. Kline, and K. McCarron. "High-Q microwave acoustic resonators and filters," IEEE Trans. Microwave Theory Tech., vol. 41, pp. 2139-2146, Dec. 1993.
4. J. Rosenbaum, Bulk Acoustic Wave Theory and Devices. Norwood, MA: Artech House, 1988, pp. 371-410.
5. A. Ballato, "Bulk and surface acoustic wave excitation and network representation," in Proc. 28th Annu. Freq. Contr. Symp., 1974, pp. 270-279.
6. B. Olutade and W. Hunt, "Sensitivity analysis of a thin film bulk acoustic resonator ladder filter," in Proc. IEEE Int. Freq. Contr. Symp., 1997, pp. 737-742.
7. K. Tsubouchi and N. Mikoshiba, "Zero-temperature-coefficient SAW devices on AIN epitaxial films," IEEE Trans. Sonics Ultrason., vol. SU-32, pp. 634-644, Sept. 1985.
8. 2-Si layered structure," Wave Electron., vol. 3, pp. 35-49, 1977.
9. G. Simmons and H. Wang, Single Crystal Elastic Constants and Calculated Aggregate Properties: A Handbook. Cambridge, MA: M.I.T. Press, 1971, p. 7.
10. Y. Touloukian, Thermophysical Properties of Matter. vol. 12, New York, NY: IFI/Plenum, 1975, pp. 2-12.
11. Y. Touloukian, Thermophysical Properties of Matter, vol. 13, New York, NY: IFI/Plenum, 1977.