Post-processing techniques for locally self-assembled silicon nanowires

Sensors and Actuators, A: Physical

Volumn 135, Issue 1, 2007, Pages 10-15

  Englander, Ongi ^a   Christensen, Dane ^a   Kim, Jongbaeg ^b   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Yonsei University   (South Korea)

Author keywords

Integration; NEMS; Post processing; Silicon nanowires

Indexed keywords

MEMS; METALLIZING; NEMS; SILICON;

POST-PROCESSING; SUPER CRITICAL DRYING;

NANOWIRES;

EID: 33947248075     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.08.004     Document Type: Article

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