Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2

Thin Solid Films

Volumn 515, Issue 12, 2007, Pages 4869-4873

  Nakao, S ^a   Stamate, E ^a   Sugai, H ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Heating mechanism; Langmuir probe; Surface wave plasma; Thermal probe

Indexed keywords

ELECTRIC FIELDS; ELECTRON ENERGY ANALYZERS; EMISSION SPECTROSCOPY; MICROWAVES; SLOT ANTENNAS; SURFACE WAVES;

HEATING MECHANISMS; MICROWAVE DISCHARGE; SURFACE WAVE PLASMAS; THERMAL PROBES;

LANGMUIR PROBES;

EID: 33947124121     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.10.050     Document Type: Article

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