Design and simulation of a piezoresistive mems pressure sensor for marine applications

Multiphase Phenomena and CFD Modeling and Simulationin Materials Processes

Volumn , Issue , 2004, Pages 347-355

  Aravamudhan, Shyam ^a   Bhansali, Shekhar ^a  

^a University of South Florida   (United States)

Author keywords

Diaphragm; Piezoresistor; Pressure sensor

Indexed keywords

DEPTH SENSORS; DIAPHRAGM; PIEZORESISTOR; PRESSURE SENSOR;

COMPUTER SIMULATION; FINITE ELEMENT METHOD; MARINE APPLICATIONS; PIEZOELECTRIC DEVICES; SENSITIVITY ANALYSIS; SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 3042699932     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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