Investigation of a low-cost broad-range silicon-based temperature sensor

IEEE Transactions on Industry Applications

Volumn 35, Issue 5, 1999, Pages 1178-1183

  Qiu, Helen Jiang ^a   Jordan Maclay, G ^a  

^a 1120 Science and Engineering Offices   (United States)

Author keywords

Appliance; Copper doped silicon; Microsensors; Sensors; Temperature; Transition metal

Indexed keywords

TEMPERATURE MEASUREMENT; TRANSITION METAL ALLOYS;

TEMPERATURE SENSORS;

MICROSENSORS;

EID: 0033184463     PISSN: 00939994     EISSN: None     Source Type: Journal    
DOI: 10.1109/28.793382     Document Type: Article

References (5)

1. The Temperature Handbook, Omega Technologies Company, Stamford, CT, 1990.
2. R. G. Pierret, Advanced Semiconductor Fundamentals. Reading, MA: Addison-Wesley, 1987.
3. Institution of Electrical Engineers, Properties of Silicon. London, U.K.: INSPEC, 1988.
4. E. R. Weber, Transition metals in silicon," Appl. Phys. A, vol. 30, no. 1, sec. 2, pp. 1-22, Jan. 1983.
5. J. W. Mayer and S.S. Lau, Electronic Materials Science: For Integrated Circuits in Si and GaAs. Upper Saddle River, NJ: Prentice-Hall, 1990.