The roles of hydrogen and holes in trap generation and breakdown in ultra-thin SiON dielectrics

Technical Digest - International Electron Devices Meeting, IEDM

Volumn 2005, Issue , 2005, Pages 392-395

  Nicollian, Paul E ^a   Krishnan, Anand T ^a   Bowen, Chris ^a   Chakravarthi, Srini ^a   Chancellor, Cathy A ^a   Khamankar, Rajesh B ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

TRAP GENERATION; ULTRA-THIN SION DIELECTRICS;

ELECTRIC BREAKDOWN; HOLE TRAPS; HYDROGEN;

GATE DIELECTRICS;

EID: 33847694310     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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