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Volumn 126, Issue 4-6, 1996, Pages 220-222
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Achromatic phase-shifting for two-wavelength phase-stepping interferometry
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ACHROMATIC PHASE SHIFTING;
MEASUREMENT RANGE AND ACCURACY;
OPTICAL ARRANGEMENT;
PHASE DIFFERENCE;
PHASE STEPPING INTERFEROMETRY;
SURFACE PROFILING;
TWO WAVELENGTH ILLUMINATION;
CALCULATIONS;
HELIUM NEON LASERS;
INTERFEROMETERS;
INTERFEROMETRY;
LIGHT INTERFERENCE;
LIGHT POLARIZATION;
MICROMETERS;
MICROSCOPES;
OPTICAL ROTATION;
OPTICAL VARIABLES MEASUREMENT;
PHASE SHIFT;
SURFACE MEASUREMENT;
PHASE SHIFTERS;
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EID: 0030149668
PISSN: 00304018
EISSN: None
Source Type: Journal
DOI: 10.1016/0030-4018(96)00118-6 Document Type: Article |
Times cited : (26)
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References (8)
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