High resolution phase zone plates for water window wavelengths

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3449, Issue , 1998, Pages 118-128

  Peuker, M ^a   Schneider, G ^a   Weiss, D ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

Copolymer galvanoform; Diffraction efficiency; High aspect ratio; Phase zone plate; X ray microscopy

Indexed keywords

ASPECT RATIO; COPOLYMERS; DIFFRACTION; ELECTRODEPOSITION; IRRADIATION; NANOSTRUCTURED MATERIALS; REACTIVE ION ETCHING; X RAY MICROSCOPES; X RAY SCATTERING;

PHASE ZONE PLATES;

X RAY SPECTROSCOPY;

EID: 0032225453     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.330338     Document Type: Conference Paper

References (14)

1. Resolving power of a zone plate
2. Theoretical description of the diffraction properties of zone plates with small outermost zone width
3. Zone plates with high efficiency in high orders of diffraction described by dynamical theory
4. Nanofabrication of zone plates for x-ray microscopy
5. Cross-linked polymers for nanofabrication of high-resolution zone plates in nickel and germanium
6. Nanostructuring high resolution phase zone plates in nickel and germanium using cross-linked polymers
7. Production of ultra thin silicon foils
8. Low-distortion electron-beam lithography for fabrication of high-resolution germanium and tantalum zone plates
9. Radiation-enhanced network formation in copolymer galvanoforms for diffractive nickel x-ray optics with high aspect ratios