Synthesis and fine patterning of organic-inorganic composite SiO 2 -Al 2 O 3 thick films

Applied Surface Science

Volumn 253, Issue 12, 2007, Pages 5442-5446

  Liang, Q L ^a,b   Zhao, G Y ^a   Lu, J G ^c  

^a XI'AN UNIVERSITY OF TECHNOLOGY   (China)

^b SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORPORATION   (China)

^c ZHEJIANG UNIVERSITY   (China)

Author keywords

Fine patterning; SiO 2 Al 2 O 3 thick film; Sol gel process

Indexed keywords

CHELATION; SOL-GEL PROCESS; SYNTHESIS (CHEMICAL); ULTRAVIOLET RADIATION;

CHELATE RINGS; FINE PATTERNING; SIO2-AL2O3 THICK FILM;

THICK FILMS;

EID: 33847648828     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.12.106     Document Type: Article

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