Patterned multipixel membrane mirror MEMS optically addressed spatial light modulator with megahertz response

IEEE Photonics Technology Letters

Volumn 19, Issue 3, 2007, Pages 173-175

  Griffith, Gregory ^a,b   Haji Saeed, Bahareh ^c   Sengupta, Sandip K ^c   Goodhue, William D ^a   Khoury, Jed ^d   Woods, Charles L ^d   Kierstead, John ^e  

^a UNIVERSITY OF MASSACHUSETTS LOWELL   (United States)

^b Palomar Medical Technologies Inc   (United States)

^c University of Massachusetts   (United States)

^d AIR FORCE RESEARCH LABORATORY   (United States)

^e SOLID STATE SCIENTIFIC CORPORATION   (United States)

Author keywords

Adaptive optics; Microstructure devices; Optoelectronics

Indexed keywords

ADAPTIVE OPTICS; DECONVOLUTION; FREQUENCY RESPONSE; LIGHT MODULATORS; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTOELECTRONIC DEVICES; SILICON NITRIDE;

MEGAHERTZ RESPONSE; MICROSTRUCTURE DEVICES;

MEMS;

EID: 33847406245     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2006.890029     Document Type: Article

References (7)

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