메뉴 건너뛰기




Volumn 45, Issue 14, 2006, Pages 3226-3236

Photoconductive optically driven deformable membrane under high-frequency bias: Fabrication, characterization, and modeling

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; ELECTRODEPOSITION; LIGHT MODULATION; MIRRORS; OPTICAL MATERIALS; PHOTOCONDUCTING MATERIALS; SEMICONDUCTING GALLIUM ARSENIDE;

EID: 33745798146     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.003226     Document Type: Article
Times cited : (14)

References (12)
  • 1
    • 0033897439 scopus 로고    scopus 로고
    • Membrane mirror light modulator technology
    • Diffractive/Holographic Technologies and Spatial Light Modulators VII, 1. V. Cindrich, S. H. Lee, and R. L. Sutherland, eds.
    • C. Warde, J. McCann, J. M. V. Shrauger, H. Ieong, A. Ersen, X.-Y. Wang, and J. Hubbard, "Membrane mirror light modulator technology," in Diffractive/Holographic Technologies and Spatial Light Modulators VII, 1. V. Cindrich, S. H. Lee, and R. L. Sutherland, eds., Proc. SPIE 3951, 191-199 (2000).
    • (2000) Proc. SPIE , vol.3951 , pp. 191-199
    • Warde, C.1    McCann, J.2    Shrauger, J.M.V.3    Ieong, H.4    Ersen, A.5    Wang, X.-Y.6    Hubbard, J.7
  • 2
    • 85076092118 scopus 로고
    • Membrane mirror light valve for high-definition projection display
    • Electroluminescent Materials, Devices, and Large-Screen Displays, E. M. Conwell and M. R. Miller, eds.
    • C. Warde, J. E. Hubbard, Jr., G. Genetti, L. Lerman, and W. Loizides, "Membrane mirror light valve for high-definition projection display," in Electroluminescent Materials, Devices, and Large-Screen Displays, E. M. Conwell and M. R. Miller, eds., Proc. SPIE 1910, 270-279 (1993).
    • (1993) Proc. SPIE , vol.1910 , pp. 270-279
    • Warde, C.1    Hubbard, J.E.2    Genetti Jr., G.3    Lerman, L.4    Loizides, W.5
  • 3
    • 0041366598 scopus 로고
    • Membrane-mirror-light-valve-based infrared scene projector
    • Characterization and Propagation of Sources and Backgrounds, W. R. Watkina and D. Clement, eds.
    • C. Warde and J. E. Hubbard, Jr., "Membrane-mirror-light-valve-based infrared scene projector," in Characterization and Propagation of Sources and Backgrounds, W. R. Watkina and D. Clement, eds., Proc. SPIE 2223, 544-557 (1994).
    • (1994) Proc. SPIE , vol.2223 , pp. 544-557
    • Warde, C.1    Hubbard Jr., J.E.2
  • 4
    • 0347145170 scopus 로고
    • The photoemitter membrane light modulator image transducer
    • J. D. McGee, ed. (Academic)
    • L. E. Somers, "The photoemitter membrane light modulator image transducer," in Advances in Electronics and Electron Physics, J. D. McGee, ed. (Academic, 1972), Vol. 33A, p. 493.
    • (1972) Advances in Electronics and Electron Physics , vol.33 A , pp. 493
    • Somers, L.E.1
  • 5
    • 3843094127 scopus 로고
    • An optical spatial phase modulator array activated by optical signals
    • Institute of Electrical and Electronics Engineers
    • F. Reizman, "An optical spatial phase modulator array activated by optical signals," in Proceedings of the 1969 Electro-Optical Systems Design Conference (Institute of Electrical and Electronics Engineers, 1969), pp. 225-230.
    • (1969) Proceedings of the 1969 Electro-optical Systems Design Conference , pp. 225-230
    • Reizman, F.1
  • 6
  • 7
    • 0021877829 scopus 로고
    • Optically addressed membrane spatial light modulator
    • D. R. Pape, "Optically addressed membrane spatial light modulator," Opt. Eng. 24, 107-110 (1985).
    • (1985) Opt. Eng. , vol.24 , pp. 107-110
    • Pape, D.R.1
  • 9
    • 0020846821 scopus 로고
    • Characteristics of the deformable mirror device for optical information processing
    • D. R. Pape and L. J. Hornbeck, "Characteristics of the deformable mirror device for optical information processing," Opt. Eng. 22, 675-681 (1983).
    • (1983) Opt. Eng. , vol.22 , pp. 675-681
    • Pape, D.R.1    Hornbeck, L.J.2
  • 10
    • 2842526597 scopus 로고
    • Deformable-mirror spatial light modulators
    • SPIE
    • L. J. Hornbeck, Deformable-Mirror Spatial Light Modulators, Vol. 1150 of SPIE Critical Reviews (SPIE, 1989), pp. 86-102.
    • (1989) SPIE Critical Reviews , vol.1150 , pp. 86-102
    • Hornbeck, L.J.1
  • 11
    • 0005338843 scopus 로고    scopus 로고
    • A silicon eye using MEMS micromirrors
    • N. Clark, "A silicon eye using MEMS micromirrors," MRS Bull. 26, 320-324 (2001).
    • (2001) MRS Bull. , vol.26 , pp. 320-324
    • Clark, N.1
  • 12
    • 0037253493 scopus 로고    scopus 로고
    • Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry
    • C. Quan, S. H. Wang, C. J. Tay, A. Q. Liu, and H. M. Shang, "Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry," Opt. Eng. 42, 92-97 (2003).
    • (2003) Opt. Eng. , vol.42 , pp. 92-97
    • Quan, C.1    Wang, S.H.2    Tay, C.J.3    Liu, A.Q.4    Shang, H.M.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.