Optically driven microelectromechanical-system deformable mirror under high-frequency AC bias

Optics Letters

Volumn 31, Issue 6, 2006, Pages 808-810

  Khoury, J ^a   Drehman, A ^a   Woods, C L ^a   Haji Saeed, B ^b   Sengupta, S K ^b,c   Goodhue, W ^d   Kierstead, J ^c  

^a AIR FORCE RESEARCH LABORATORY   (United States)

^b University of Massachusetts Lowell   (United States)

^c SOLID STATE SCIENTIFIC CORPORATION   (United States)

^d UNIVERSITY OF MASSACHUSETTS LOWELL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIAS REDISTRIBUTION; CONDUCTIVE TRANSPARENT ZNO; METALIZED POLYMERIC MEMBRANE MIRROR;

MIRRORS; OPTICAL DEVICES; PHOTOCONDUCTING MATERIALS; POLYMERIC MEMBRANES; ZINC OXIDE;

MICROELECTROMECHANICAL DEVICES;

EID: 33645742616     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.31.000808     Document Type: Article

References (6)

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3. N. Clark, MRS Bull. 26(4), 320 (2001).
4. T. Bifano, P. Bierden, H. Zhu, S. Cornelissen, and J. H. Kim, in Proc. SPIE 5490, 1472 (2004).
5. B. Haji-Saeed, R. Kolluru, D. Pyburn, R. Leon, S. K. Sengupta, M. Testorf, W. Goodhue, J. Khoury, A. Drehman, C. L. Woods, and J. Kierstead, in Proc. SPIE 5437, 115 (2004).
6. B. Haji-Saeed, R. Kolluru, D. Pyburn, R. Leon, S. K. Sengupta, M. Testorf, W. Goodhue, J. Khoury, A. Drehman, C. L. Woods, and J. Kierstead, "Photoconductive optically driven deformable membrane under high-frequency bias: fabrication, characterization, and modeling," Appl. Opt. (to be published).