Measurement of the thermal conductivity of TiO2 thin films by using the thermo-reflectance method

Thermochimica Acta

Volumn 455, Issue 1-2, 2007, Pages 55-59

  Mun, Jungho ^a   Kim, Sok Won ^a   Kato, Ryozo ^b   Hatta, Ichiro ^c   Lee, Sang Hyun ^d   Kang, Kweon Ho ^e  

^a University of Ulsan   (South Korea)

^b Sinku Riko Inc   (Japan)

^c FUKUI UNIVERSITY OF TECHNOLOGY   (Japan)

^d Korea Research Institute of Standards and Science   (South Korea)

^e Korea Atomic Energy Research Institute   (South Korea)

Author keywords

Heat treatment; Thermal conductivity; Thermo reflectance method; TiO2 thin film

Indexed keywords

GRAIN SIZE AND SHAPE; HEAT TREATMENT; SILICON WAFERS; THERMAL CONDUCTIVITY; THICK FILMS; THIN FILMS;

HEAT TREATED FILMS; REFLECTANCE VARIATION; TEMPERATURE VARIATION; THERMOREFLECTANCE METHOD;

TITANIUM DIOXIDE;

EID: 33847360549     PISSN: 00406031     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tca.2006.11.018     Document Type: Article

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