Novel process flow for the integration of carbon nanotubes into MEMS

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 105-108

  Jungen, Alain ^a   Stampfer, Christoph ^a   Hoetzel, Jochen ^a   Hierold, Christofer ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Carbon nanotubes; Nanosystems; Nanotechnology; Process integration

Indexed keywords

BATCH-FABRICATION; NANO-SCALE TRANSDUCERS; NANOSYSTEMS; PROCESS INTEGRATION;

CATALYSIS; GROWTH (MATERIALS); MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; POLYSILICON; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL);

CARBON NANOTUBES;

EID: 27544480850     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496370     Document Type: Conference Paper

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