A micromechanical resonating RF mixer

Conference Proceedings- European Microwave Conference

Volumn 3, Issue , 2004, Pages 1297-1300

  Alastalo, Ari T ^a   Koskenvuori, Mika ^b   Seppä, Heikki ^a   Dekker, James ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; ELECTRIC IMPEDANCE; ELECTRIC POTENTIAL; INSERTION LOSSES; RESONATORS; SCANNING ELECTRON MICROSCOPY;

CAPACITIVE TRANSDUCER; MICROCHEMICAL RESONATING RF MIXERS; SILICON-ON-INSULATOR (SOI); TUNING-FORK RESONATOR;

MIXER CIRCUITS;

EID: 18844418219     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Ark-Chew Wong and Clark T.-C. Nguyen "Micromechanical Mixer-Filters ("Mixlers")," Journal of Microelectromechanical Systems, vol. 13, no. 1, February 2004.
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3. A. Erbe, H. Krömmer, A. Kraus, and R. H. Blick, "Mechanical mixing in nonlinear nanomechanical resonators", Applied Physics Letters, vol. 77, no. 19, pp. 3102-3104, 6 November 2000.
4. Ari T Alastalo, Tomi Mattila, Heikki Seppä, and James Dekker, "Micromechanical Slow-Velocity Delay Lines," Proc EuMW2003, European Microwave Week, pp. 967-970, 6-10 October 2003.
5. Emmanuel Quévy, Bernard Legrand, Dominique Collard, and Lionel Buchaillot, "Ultimate Technology for Micromachining of Nanometric Gap HF Micromechanical Resonators," Proc MEMS, pp. 157-160, 19-23 January 2003.
6. D. Rugar and P. Grütter, "Mechanical Parametric Amplification and Thermomechanical Noise Squeezing", Physical Review Letters, vol. 67, no. 6, pp. 699-702, 5 August 1991.
7. Ville Kaajakari, Tomi Mattila, Aarne Oja, Jyrki Kiihamäki, and Heikki Seppä, "Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator for Low-Phase-Noise Oscillator Applications," IEEE Electron Device Letters, vol. 25, no. 4, April 2004.