Indentation testing of axisymmetric freestanding nanofilms using a MEMS load cell

Sensors and Actuators, A: Physical

Volumn 134, Issue 1, 2007, Pages 264-270

  Leseman, Z C ^a   Mackin, T J ^b  

^a MSC01 1070   (United States)

^b Department of Mechanical Engineering ^*  (United States)

Author keywords

Freestanding; MEMS; Nano film

Indexed keywords

GOLD; LOADS (FORCES); NANOSTRUCTURED MATERIALS; STIFFNESS; THIN FILMS;

GOLD FILMS; LOAD CELLS; NANOFILMS;

MICROELECTROMECHANICAL DEVICES;

EID: 33847245407     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.04.055     Document Type: Article

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